Menu
Close
  • Why PDF Solutions
  • Products
    • Exensio® Analytics Platform
    • Advanced Insights for Manufacturing
    • Design-for-Inspection™ System
    • Characterization Vehicle® System
    • Cimetrix® Connectivity & Control
    • Cimetrix Sapience® Platform
    • Technology
    • Partners
  • Services
    • Overview
    • Integrated Yield Ramp
    • Professional Services
    • Value Added Services
  • Resources
    • All Resources
    • Published Papers
    • News & PR
    • Events
    • Applications
    • Training
  • Company
    • Overview
    • Management Team
    • Board of Directors
    • Corporate Governance
    • Careers
    • Investor Relations
    • Locations
    • Trust Center
  • Support
    • Overview
    • Support Portal
    • Software Downloads
  • Contact
  • Schedule A Demo
  • Login
  • Support
    • Overview
    • Support Portal
    • Software Downloads
  • Contact
  • Schedule A Demo
Login below to view protected resources.

Lost your password?
Forgotten Password
Cancel
  • Why PDF Solutions
  • Products
    • Exensio® Analytics Platform
    • Advanced Insights for Manufacturing
    • Design-for-Inspection™ System
    • Characterization Vehicle® System
    • Cimetrix® Connectivity & Control
    • Cimetrix Sapience® Platform
    • Technology
    • Partners
  • Services
    • Overview
    • Integrated Yield Ramp
    • Professional Services
    • Value Added Services
  • Resources
    • All Resources
    • Published Papers
    • News & PR
    • Events
    • Applications
    • Training
  • Company
    • Overview
    • Management Team
    • Board of Directors
    • Corporate Governance
    • Careers
    • Investor Relations
    • Locations
    • Trust Center
Resources

SPIE 2009 – OPC Simplification and Mask Cost Reduction Using Regular Design Fabrics

Posted on February 25, 2009 by PDF Solutions

Abstract: Cost and complexity associated with OPC and masks are rapidly increasing to the point that they could limit technology scaling in the future. This paper focuses on demonstrating the advantages of regular design fabrics for OPC simplification to enable scaling and minimize costs for technologies currently in volume production. The application of such a simplified OPC flow results in much smaller mask data volumes due to significantly fewer edges compared to the conventional designs and OPC flows. Moreover, the proposed approach enables reduced mask write times, hence lower mask costs.

We compare OPC performance and complexity on standard cell designs to that of layouts on a regular design fabric. We first demonstrate advantages and limitations within an industrial model-based OPC solution. Then, a simplified rulebased OPC solution is discussed for the Metal 1 layer. This simplified OPC solution demonstrates a 70X run time improvement and an order of magnitude reduction in both the output edge count per unit shape and shot count per unit shape while maintaining the printabalility advantages of regular design fabrics. The simplified OPC also demonstrates a 50% reduction in mask-write time. Finally, the benefit of regular design fabrics for OPC simplification and mask cost reduction at a 32nm node is discussed.

DOWNLOAD NOW

Keywords: DFM, Regular Design, OPC, Yield

  • All
  • Published Papers
  • News & PR
  • Events
  • Applications

Ready to get started?

Contact

Ready to get Started with PDF Solutions?

Learn how we can transform your manufacturing data into actionable intelligence and improve your product yield, quality, and reliability

Schedule A Demo Contact Us

Corporate Headquarters
2858 De La Cruz Blvd.
Santa Clara, CA 95050 USA

Phone: 408-280-7900

Fax: 408-280-7900

Email: info@pdf.com

Follow Us on Social Media

  • Facebook
  • Twitter
  • LinkedIn
  • Instagram

© 2023 PDF Solutions. All rights reserved.

  • Privacy Policy
  • Terms of Service
  • Sitemap
This website uses cookies to improve your experience. We'll assume you're ok with this, but you can opt-out if you wish. Cookie settingsACCEPT
Privacy & Cookies Policy

Privacy Overview

This website uses cookies to improve your experience while you navigate through the website. Out of these cookies, the cookies that are categorized as necessary are stored on your browser as they are essential for the working of basic functionalities of the website. We also use third-party cookies that help us analyze and understand how you use this website. These cookies will be stored in your browser only with your consent. You also have the option to opt-out of these cookies. But opting out of some of these cookies may have an effect on your browsing experience.
Necessary
Always Enabled
Necessary cookies are absolutely essential for the website to function properly. This category only includes cookies that ensures basic functionalities and security features of the website. These cookies do not store any personal information.
Non-necessary
Any cookies that may not be particularly necessary for the website to function and is used specifically to collect user personal data via analytics, ads, other embedded contents are termed as non-necessary cookies. It is mandatory to procure user consent prior to running these cookies on your website.
SAVE & ACCEPT