発表論文

Published Paper

2025 – End-to-End Yield Management for Compound Semiconductors Manufacturing

Yield Management

,

Silicon Carbide

,

製造アナリティクス

,

Compound Semiconductors

Published Paper

2025-Full Wafer Inspection for Voltage Contrast Systematic Defects Using High-Throughput Point Scan

e-Beam

,

Voltage Contrast

Published Paper

2025-Stress-related Local Layout Effects in FinFET Technology and Device Design Sensitivity

Modeling

,

Silicon Carbide

Published Paper

2025-Product Design Enhancement with Test Structures for Non-Contact Detection of Yield Detractors

Yield Management

,

e-Beam

,

Characterization

,

Design for Manufacturing

Published Paper

2025-The Overview of Silicon Carbide Technology: Status, Challenges, Key Drivers, and Product Roadmap

Electric vehicles

,

Silicon Carbide

Published Paper

2025-Full-chip Voltage Contrast Inference Using Deep Learning; You Only Look Once: Voltage Contrast (YOLO-VC)

e-Beam

,

Voltage Contrast

Published Paper

2024 – Expediting manufacturing safe launch with Big Data AI/ML analytic solutions on the cloud

Manufacturing

,

Yield Management

Published Paper

EDTM 2022 - 検査とモニタリングのための新しい電子ビーム技術

Yield Management

,

e-Beam

Published Paper

EDTM 2022 - BEOLオーバーレイとプロセス・マージン特性の新手法

Design for Manufacturing

,

Voltage Contrast

Published Paper

NANOTS 2021 - ダイレクトスキャンによる先進の高スループットeビーム検査

プロセス制御

,

Design for Manufacturing

,

Voltage Contrast

Published Paper

APCSM 2020 - 機械学習と高度な異常値検出の組み合わせによる品質向上とコスト削減

AI/ML

,

Data

Published Paper

IEEE S3S 2019 - FDSOI技術における特性評価の課題とソリューション

Yield Management